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Development of Extreme-Ultraviolet Light Source by Laser-Produced Plasma
Laser produced plasma Extreme Ultraviolet (EUV) Tin opacity
2009/6/1
Extreme ultraviolet (EUV) radiation from laser-produced plasma has been studied for mass-production of the next generation semiconductor devices with EUV lithography. A full set of experimental databa...
The Realization of ZnO Ultraviolet Laser
ZnO Ultraviolet Laser Atomic Force Microscope X-ray diffraction
2010/7/15
During these years, ZnO has become the promising opto-electronic material. In this paper, ZnO film was deposited by POMBE and studied by AFM and XRD. Its optical pumped ultraviolet laser was realized ...